Maskless selective diffusion of Si into GaAs

Maskless selective diffusion of Si into GaAs

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A maskless selective diffusion of silicon into GaAs is achieved by the selective modification of the GaAs surface using low energy Ar sputtering. The Ga rich surface resulting from the Ar sputtering prevents the diffusion of silicon into GaAs.


    1. 1)
      • K. Meehan , J.M. Brown , N. Holonyak , R.D. Burnham , T.L. Paoli , W. Streifer . Stripe geometry AlGaAs-GaAs quantum well heterostructure lasers defined by impurity-induced disordering. Appl. Phys. Lett. , 700 - 702
    2. 2)
      • M.E. Greiner , J.F. Gibbons . Diffusion and electrical properties of silicon doped galluim arsenide. J. Appl. Phys. , 5181 - 5187
    3. 3)
      • M.E. Greiner , J.F. Gibbons . Diffusion of silicon in gallium arsenide using rapid thermal processing: experimental and model. Appl. Phys. Lett. , 750 - 752
    4. 4)
      • E. Omura , X.S. Wu , G.A. Vawter , L. Coldren , E. Hu. , J.L. Merz . Closed tube diffusion of silicon in GaAs from sputtered silicon film. Electron. Lett. , 496 - 498
    5. 5)
      • C.C. Chang , P.H. Citrin , B. Schwartz . Chemical preparation of GaAs surfaces and their characterization by Auger electron and X-ray photoemission spectroscopies. J. Vac. Sci. Technol. , 943 - 952

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