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Wavelength dependence of optical oxidation of silicon

Wavelength dependence of optical oxidation of silicon

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© The Institution of Electrical Engineers
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Using a novel technique to amplify small increases in the oxidation rate of laser-irradiated silicon, we have successfully isolated a photonic contribution to the reaction induced by CW argon laser radiation.

Inspec keywords: laser beam applications; oxidation; laser beam effects; semiconductor technology; silicon

Other keywords: laser enhanced oxidation of Si; CW Ar laser radiation; Si oxidation; wavelength dependence; Ar laser; photonic contribution; oxidation rate

Subjects: Surface treatment (semiconductor technology); Laser beam interactions and properties; Laser applications; Elemental semiconductors

References

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      • E.M. Young , W.A. Tiller . Photon enhanced oxidation of silicon. Appl. Phys. Lett.
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