Bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of LiNbO3
A new BAW transducer consisting of a groove array on a surface of LiNbO3 and finger electrodes on the top surface and the groove bottoms is described. It is demonstrated that the shear-wave transducer fabricated on X-cut LiNbO3 has a conversion loss as low as 2.5 dB and a fractional bandwidth of about 110%.