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1887

Bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of LiNbO3

Bulk-acoustic-wave transducer consisting of interdigital electrodes on a grooved surface of LiNbO3

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© The Institution of Electrical Engineers
Published

A new BAW transducer consisting of a groove array on a surface of LiNbO3 and finger electrodes on the top surface and the groove bottoms is described. It is demonstrated that the shear-wave transducer fabricated on X-cut LiNbO3 has a conversion loss as low as 2.5 dB and a fractional bandwidth of about 110%.

Inspec keywords: lithium compounds; piezoelectric transducers

Other keywords: 10 to 120 MHz; bulk acoustic wave transducer; grooved surface of LiNbO3; BAW transducer; X-cut LiNbO3; conversion loss; finger electrodes; interdigital electrodes; fractional bandwidth; groove array; shear-wave transducer

Subjects: Acoustic wave devices; Transduction; devices for the generation and reproduction of sound; Sonic and ultrasonic transducers and sensors

References

    1. 1)
      • A.W. Warner , M. Onoe , G.A. Coquin . Determination of elastic and piezoelectric constants for crystals in class (3m). J. Acoust. Soc. Am. , 1223 - 1231
    2. 2)
      • A. Waranabe , T. Yano . Direction of displacement in LiNbO3 X-cut plate shear transducer. IEEE Trans. , 159 - 160
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