Very high-transconductance short-channel GaAs MESFETs with Ga0.3Al0.7As buffer layer
MESFETs with 0.17μm gate length were manufactured with an n+GaAs active layer (3 × 1018cm-3) and an undoped Ga0.3Al0.7As buffer layer grown by molecular-beam epitaxy. The deives showed very high transconductance (700mS/mm) with good pinchoff characteristics. The experimental transconductance values were compared with calculated ones using a model that assumed total carrier confinement within the active layer by a barrier potential at the GaAs/GaAlAs interface. The results suggest that very high-transconductance short-gate-length MESFETs can be fabricated with a heavily doped GaAs active layer provided that the carrier density in the active layer is maintained at the doping level.