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Temperature dependence of resonant frequency in optically excited diaphragms

Temperature dependence of resonant frequency in optically excited diaphragms

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© The Institution of Electrical Engineers
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Silicon diaphragms of 4 μm thickness, fabricated by anisotropic etching techniques, are coated with a thin layer of aluminium. An intensity-modulated laser beam focused on the diaphragm generates transverse vibrations which are detected interferometrically. The measured deflections, resonant frequencies and temperature dependence of resonant frequencies are reported.

Inspec keywords: piezoelectric transducers; light interferometry; pressure transducers; elemental semiconductors; radiation pressure; laser beam effects; aluminium; piezoelectric oscillations; silicon

Other keywords: temperature dependence; interferometric detection; intensity-modulated laser beam; piezoelectric sensor; deflections; resonant frequency; Si-Al diaphragm; transverse vibrations; optically excited diaphragms; anisotropic etching

Subjects: Piezoelectric and ferroelectric devices; Transducers; Laser beam interactions and properties; Pressure and vacuum measurement; Optical interferometry; Sensing devices and transducers; Other topics in specialised instrumentation; Laser beam characteristics and interactions

References

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      • Smits, J., Tilmans, H.A.C., Lammerink, T.S.J.: `Pressure dependence on resonant diaphragm pressure sensor', Proc. inter, conf. on solid state sensors and actuators, 1985, Philadelphia, p. 93–96.
    2. 2)
      • S. Venkatesh , B. Culshaw . Optically activated vibrations in a micromachined silicon structure. Electron. Lett. , 315 - 317
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      • D. Young . Vibration of rectangular plates by the Ritz method. J. Appl. Mech. , 448 - 453
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      • R.M. Langdon . Resonator sensors—a review. J. Phys. E , 103 - 115
    5. 5)
      • E. Dieulesaint , D. Royer , C. bonnefoy . Mechanical excitation of a membrane by an optical beam. Ultrasonics , 802 - 805
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