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Silicon diaphragms of 4 μm thickness, fabricated by anisotropic etching techniques, are coated with a thin layer of aluminium. An intensity-modulated laser beam focused on the diaphragm generates transverse vibrations which are detected interferometrically. The measured deflections, resonant frequencies and temperature dependence of resonant frequencies are reported.
Inspec keywords: piezoelectric transducers; light interferometry; pressure transducers; elemental semiconductors; radiation pressure; laser beam effects; aluminium; piezoelectric oscillations; silicon
Other keywords:
Subjects: Piezoelectric and ferroelectric devices; Transducers; Laser beam interactions and properties; Pressure and vacuum measurement; Optical interferometry; Sensing devices and transducers; Other topics in specialised instrumentation; Laser beam characteristics and interactions