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GaInAs PIN photodiodes grown by atmospheric-pressure MOVPE

GaInAs PIN photodiodes grown by atmospheric-pressure MOVPE

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© The Institution of Electrical Engineers
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GaInAs/InP PIN photodiodes with low dark currents and capacitances have been successfully fabricated from material grown by atmospheric-pressure MOVPE. Both Zn-diffused and grown-in p+-n homojunction material have provided yields of over 70% for devices with leakage currents less than 20 nA. This growth technique, therefore, looks particularly appropriate for a reproducible, high-yield and inexpensive method of photodetector production.

Inspec keywords: indium compounds; gallium arsenide; semiconductor growth; III-V semiconductors; photodetectors; photodiodes; vapour phase epitaxial growth

Other keywords: atmospheric-pressure MOVPE; yields; low capacitance; photodetector; leakage currents; growth technique; GaInAs/InP PIN photodiodes; low dark currents; p+- n homojunction

Subjects: Photodetectors; Epitaxial growth; Photoelectric devices

References

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