Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices

Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices

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Enhancement of electromechanical coupling has been shown in numerical calculations with an additional massive and conducting layer, such as Au, which makes the velocity of SAW slow between a ZnO thin film and an Si substrate. It is also shown that the electromechanical coupling factor can be increased without deterioration of the temperature coefficient of phase velocity.


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      • G.W. Farnell . Symmetry considerations for elastic layer modes propagation in anisotropic piezoelectric crystals. IEEE Trans. , 229 - 238

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