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Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices

Effect of additional heavy metal layer on ZnO-Si monolithic SAW devices

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Enhancement of electromechanical coupling has been shown in numerical calculations with an additional massive and conducting layer, such as Au, which makes the velocity of SAW slow between a ZnO thin film and an Si substrate. It is also shown that the electromechanical coupling factor can be increased without deterioration of the temperature coefficient of phase velocity.

References

    1. 1)
      • S. Urabe . Voltage controlled monolithic SAW phase shifter and its application to frequency variable oscillator. IEEE Trans. , 255 - 261
    2. 2)
      • S.J. Martine , S.S. Schwartz , R.L. Gunshor , R.F. Pierret . Surface acoustic wave resonators on a ZnO-on-Si layered medium. J. Appl. Phys. , 561 - 562
    3. 3)
      • G.W. Farnell . Symmetry considerations for elastic layer modes propagation in anisotropic piezoelectric crystals. IEEE Trans. , 229 - 238
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