Surface-acoustic-wave propagation on a piezoelectric substrate with a periodic metal grating

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Surface-acoustic-wave propagation on a piezoelectric substrate with a periodic metal grating

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© The Institution of Electrical Engineers
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An analysis is presented for modes propagating via a periodic metal grating on the surface of a piezoelectric substrate. Assuming no loss in the structure, the numerical solution is exact in the limit, combining the effective permittivity function formulation with the least-squares residual applied at the surface.

Inspec keywords: piezoelectric devices; surface acoustic waves; substrates

Other keywords: periodic metal grating; effective permittivity function formulation; least-squares residual; propagation modes; piezoelectric substrate; SAW; surface acoustic waves

Subjects: Transduction; devices for the generation and reproduction of sound; Mechanical and acoustical properties of solid surfaces and interfaces; Nonlinear acoustics and macrosonics; Acoustic wave devices

References

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      • R.F. Milsom , N.H.C. Reilly , M. Redwood . Analysis of generation and detection of surface and bulk acoustic waves by interdigital transducers. IEEE Trans. , 147 - 165
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      • Yen, K.H., Lau, K.F., Kagiwada, R.S.: `Recent advances in shallow bulk acoustic wave devices', Ultrasonics Symposium, 1979, p. 776–785.
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      • H.J.A. Lariviere , J.B. Davies . The solution of electromagnetic eigenvalue problems by least squares boundary residuals. IEEE Trans. , 436 - 441
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