Monitoring the tilt angle of an ion-beam cross-section

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Monitoring the tilt angle of an ion-beam cross-section

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© The Institution of Electrical Engineers
Published

A nondestructive method is presented to monitor the tilt angle of an elliptical cross-section of an ion beam. The desired information is extracted from random signals induced by the beam on four metal electrodes forming part of a flight tube.

Inspec keywords: ion beams; ion implantation; angular measurement

Other keywords: ion implantation; flight tube; four metal electrodes; elliptical cross-section; monitoring; nondestructive method; cross section tilt angle measurement; ion-beam cross-section

Subjects: Semiconductor doping; Spatial variables measurement; Spatial variables measurement; Doping and implantation of impurities; Ion beams and ion optics; Moving charges in electric and magnetic fields

References

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      • W.B. Thompson , I. Honjo , N. Turner . (1983) The use of computers for designing and testing ion beam systems, Ion implantation: Equipment and techniques.
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      • W.J. Szajnowski . Measurement of ion beam parameters with electrostatic induction electrodes. Vacuum , 285 - 289
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      • E.J. Rogers . Optimal selection of sweep frequencies in ion implantation with X-Y scanning. Nucl. Instrum. & Methods , 305 - 310
    4. 4)
      • N.L. Johnson , S. Kotz . (1972) , Distribution in statistics: Continuous multivariate distributions.
    5. 5)
      • W.J. Szajnowski . Estimation of time-varying co-ordinates of ion beams. Electron. Lett. , 489 - 490
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