Frequency trimming for high-frequency SAW device using ultraviolet light

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Frequency trimming for high-frequency SAW device using ultraviolet light

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© The Institution of Electrical Engineers
Published

A new technique for frequency trimming of surface-acoustic-wave (SAW) devices is demonstrated using ultraviolet light. Irradiation by ultraviolet light of a very thin SiO2 film which is fabricated on a quartz substrate makes it possible to adjust the operation frequency within an accuracy of better than ±10 kHz at 900 MHz with an insertion loss increase of less than 1 dB. This technique is applied successfully to a 668 MHz SAW resonator.

Inspec keywords: silicon compounds; surface acoustic wave devices; substrates; frequency control; crystal resonators; quartz; tuning

Other keywords: UV frequency trimming; SAW resonator; accuracy <10 kHz at 900 MHz; thin SiO2 film; UHF; frequency trimming; ultraviolet light; insertion loss increase; high-frequency SAW device; quartz substrate

Subjects: Acoustic wave devices; Frequency control

References

    1. 1)
      • Parker, T.E.: `Precision surface acoustic wave (SAW) oscillators', 1982 Ultrason. Symp. Proc., IEEE, 1982, p. 268–274.
    2. 2)
      • Tanski, W.J.: `GHz SAW resonators', 1979 Ultrason. Symp. Proc., IEEE, 1979, p. 815–817.
    3. 3)
      • Lewis, M.F.: `The surface acoustic oscillator—Natural and timely development of the quartz crystal oscillators', Proc. 28th Annual Symp. Freq. Cont., 1974, p. 304–314.
    4. 4)
      • P.S. Cross , W.H. Haydl , R.S. Smith . Design and applications of two-port SAW resonators on YZ-lithium niobate. Proc. IEEE , 682 - 685
    5. 5)
      • P.S. Cross , W.R. Shreve . Frequency trimming of SAW resonators. IEEE Trans. , 231 - 234
    6. 6)
      • Helmick, C.N., White, D.J., King, R.L.: `Fine tuning of narrow-band SAW devices using dielectric overlays', 1977 Ultrason. Symp. Proc., IEEE, 1977, p. 659–663.
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