Hydrogen-induced DLTS signal in pd/n-Si Schottky diodes

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Hydrogen-induced DLTS signal in pd/n-Si Schottky diodes

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An investigation is reported into the electrical properties of palladium/silicon oxide/n-type silicon Schottky-barrier-type structures. On exposure to hydrogen a large increase in the DLTS signal is observed. This is thought to be associated with the production of electron trapping centres. Analysis reveals the presence of two traps, both located near the silicon surface.

Inspec keywords: silicon; palladium; deep level transient spectroscopy; electric sensing devices; Schottky-barrier diodes; elemental semiconductors; hydrogen

Other keywords: H2 sensors; deep level transient spectroscopy; H2 induced DLTS signal; Pd/n-Si Schottky diodes; electrical properties; production of electron trapping centres; solid state gas sensors

Subjects: Junction and barrier diodes; Impurity and defect levels; Surface double layers, Schottky barriers, and work functions; Electrical properties of metal-nonmetal contacts

References

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