Confocal Fabry–Perot sensor

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Confocal Fabry–Perot sensor

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© The Institution of Electrical Engineers
Published

The use of a spherical mirror Fabry–Perot (confocal) interferometer as an optical displacement sensor is described. The device incorporates a simple electronic servo to maintain the interferometer at an operating point of maximum sensitivity. Applications as vibration and acceleration sensors are forseen, with sensitivities for sinusoidal accelerations of 10−3 μg achievable at 10 Hz.

Inspec keywords: light interferometers; nonelectric sensing devices; acceleration measurement; displacement measurement; vibration measurement

Other keywords: optical displacement sensor; spherical mirror Fabry-Perot interferometer; sinusoidal accelerations; electronic servo; 10 Hz

Subjects: Optical interferometry; Velocity, acceleration and rotation measurement; Spatial variables measurement

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