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Confocal Fabry–Perot sensor

Confocal Fabry–Perot sensor

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The use of a spherical mirror Fabry–Perot (confocal) interferometer as an optical displacement sensor is described. The device incorporates a simple electronic servo to maintain the interferometer at an operating point of maximum sensitivity. Applications as vibration and acceleration sensors are forseen, with sensitivities for sinusoidal accelerations of 10−3 μg achievable at 10 Hz.

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