Measurement of s.a.w. device stripe/period ratio using optical diffraction

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Measurement of s.a.w. device stripe/period ratio using optical diffraction

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© The Institution of Electrical Engineers
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The stripe/period ratio of periodic s.a.w. device masks has been determined by measuring the intensity of the diffraction maxima obtained when a laser beam is transmitted through the mask. Correlation of measured data with theoretical results is excellent. The technique can also be used to measure the stripe/period ratio on actual s.a.w. devices.

Inspec keywords: masks; measurement by laser beam; light diffraction; surface acoustic wave devices

Other keywords: surface acoustic wave device; optical diffraction; measurement by laser beam; stripe period ratio

Subjects: Laser applications; Optical variables measurement; Acoustic wave devices

References

    1. 1)
      • J.W. Goodman . (1968) , Introduction to Fourier optics.
    2. 2)
      • Kitano, T., Nishikawa, K., Asawa, K.: `Amplitude weighted metal stripe reflective array compressor', Proceeding of Ultrasonic Symposium, 1977, Phoenix, USA, p. 585–589.
    3. 3)
      • C. Maerfeld , P. Tournois . Perturbation theory for the surface-wave multistrip coupler. Electron. Lett. , 115 - 116
    4. 4)
      • W.R. Smith , W.F. Pedler . Fundamental- and harmonic-frequency circuit-model analysis of interdigital transducers with arbitrary metallization ratios and polarity sequences. IEEE Trans. , 853 - 864
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