© The Institution of Electrical Engineers
A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.
References
-
-
1)
-
D. Ohji ,
T. Tohda ,
K. Wasa ,
S. Hayakawa
.
Highly oriented ZnO-films by rf sputtering of hemispherical electrode systems.
J. Appl. Phys.
-
2)
-
Burke, B.E.: `An electronically variable surface acoustic wave phase shifter', IEEE cat. no. 71 c25M, Proceedings of the 1971 international microwave symposium, p. 56–57.
-
3)
-
G. Chao
.
Monolithic surface-acoustic-wave phase shifter.
Electron. Lett.
,
3 ,
49 -
51
-
4)
-
L.D. Coldren
.
Effect of bias field in a zinc-oxide-silicon acoustic convolver.
Appl. Phys. Lett.
,
473 -
475
-
5)
-
J.D. Crowley ,
J.F. Weller ,
T.G. Giallorenzi
.
Acousto electric SAW phase shifter.
Appl. Phys. Lett.
,
558 -
660
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