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Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure

Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure

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© The Institution of Electrical Engineers
Published

A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.

Inspec keywords: field effect integrated circuits; phase shifters; surface acoustic wave devices

Other keywords: voltage controlled phase shift; monolithic integrated circuit; phase shifter; MZOS; SAW; surface acoustic wave filter

Subjects: Acoustic wave devices; Other field effect integrated circuits

References

    1. 1)
      • D. Ohji , T. Tohda , K. Wasa , S. Hayakawa . Highly oriented ZnO-films by rf sputtering of hemispherical electrode systems. J. Appl. Phys.
    2. 2)
      • Burke, B.E.: `An electronically variable surface acoustic wave phase shifter', IEEE cat. no. 71 c25M, Proceedings of the 1971 international microwave symposium, p. 56–57.
    3. 3)
      • G. Chao . Monolithic surface-acoustic-wave phase shifter. Electron. Lett. , 3 , 49 - 51
    4. 4)
      • L.D. Coldren . Effect of bias field in a zinc-oxide-silicon acoustic convolver. Appl. Phys. Lett. , 473 - 475
    5. 5)
      • J.D. Crowley , J.F. Weller , T.G. Giallorenzi . Acousto electric SAW phase shifter. Appl. Phys. Lett. , 558 - 660
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