Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure

Voltage controlled monolithic s.a.w. phase shifter using m.z.o.s. structure

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A monolithic surface-acoustic-wave (s.a.w.) phase shifter, fabricated with sputtered zinc oxide on an oxidised n silicon substrate, is demonstrated. Almost 67° of voltage controlled phase shift is achieved in 200 acoustic wavelengths of interaction region at 214 MHz.


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