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High-low junctions of n+-p-p+ bifacial back surface field solar cells have been fabricated by B11+ implantation. After an isothermal annealing step at 900°C for 10 min, an optimum surface concentration of 5 × 1019 cm−3 is observed. Its origin is found to lie in the partial electrical activation of the implanted impurities.
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http://iet.metastore.ingenta.com/content/journals/10.1049/el_19800439
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