Synthesis and analysis of d.l.t.s. spectra from m.o.s. surface states

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Synthesis and analysis of d.l.t.s. spectra from m.o.s. surface states

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© The Institution of Electrical Engineers
Published

Given Nss and σss as functions of energy and temperature, a procedure is developed to synthesise d.l.t.s spectra under arbitrary experimental conditions. Methods of analysis are then considered to determine Nss and σss from capture experiments.

Inspec keywords: metal-insulator-semiconductor structures; deep levels; surface electron states

Other keywords: capture experiments; MOS surface states; DLTS; deep level transient spectroscopy

Subjects: Electrical properties of metal-insulator-semiconductor structures; Impurity and defect levels; Electronic states (surfaces and interfaces); Metal-insulator-semiconductor structures

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