Your browser does not support JavaScript!
http://iet.metastore.ingenta.com
1887

Calculations of δv/v for thin-film s.a.w. transducers on a nonzero conductive silicon substrate

Calculations of δv/v for thin-film s.a.w. transducers on a nonzero conductive silicon substrate

For access to this article, please select a purchase option:

Buy article PDF
£12.50
(plus tax if applicable)
Buy Knowledge Pack
10 articles for £75.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

Theoretical results are presented for the piezoelectric coupling of a surface-acoustic-wave thin-film transducer on a silicon substrate having a nonzero electrical conductivity. It is shown that, for specific combinations of the material layer thicknesses, this conductivity disappears. Also, under certain conditions, the enhancement in the piezoelectric coupling is degraded.

References

    1. 1)
      • A. Venema , J.J.M. Dekkers , R.F. Humphryes . Static capacitance calculations for a surface acoustic wave interdigital transducer in multi-layered media. IEEE Trans.
    2. 2)
      • A. Venema , J.J.M. Dekkers . Enhancement of surface acoustic wave piezoelectric coupling in three-layer substrates. IEEE Trans. , 765 - 767
    3. 3)
      • J.J. Campbell , W.R. Jones . A method for estimating optimal crystal cuts propagating directions for excitation of piezoelectric surface waves. IEEE Trans. , 209 - 217
    4. 4)
      • G.S. Kino , R.S. Wagers . Theory of interdigital couplers on nonpiezoelectric substrates. J. Appl. Phys. , 1480 - 1488
    5. 5)
      • W.R. Smith , H.M. Gerard , J.H. Collins , T.M. Reeder , H.J. Shaw . Analysis of interdigital surface wave transducers by use of an equivalent circuit model. J. Appl. Phys. , 856 - 864
    6. 6)
      • W.R. Smith . Coupling efficiency estimated for acoustic surface wave excitation with piezoelectric overlays. J. Appl. Phys. , 3016 - 3018
    7. 7)
      • R.M. White , F.W. Voltmer . Direct piezoelectric coupling to surface elastic waves. Appl. Phys. Lett. , 314 - 316
    8. 8)
      • Hickernell, F.S., Adamo, M., London, A., Bush, H.: `An integrated ZnO/Si-MOSFET programmable matched filter', Proceedings of IEEE ultrasonics symposium, September 1975, p. 223–226.
    9. 9)
      • G.W. Farnell , E.L. Adler , W.P. Mason , R.N. Thurston . (1972) Elastic wave propagation in thin layers, Physical acoustics–vol. 9.
    10. 10)
      • F.S. Hickernell , J.W. Brewer . Surface-elastic-wave properties of the triode-sputtered zinc oxide surface elastic wave transducers. J. Appl. Phys. , 1061 - 1071
    11. 11)
      • H. Sasaki , N. Chubachi , Y. Kikuchi . Thickness dependence of effective coupling factors of ZnO thin-film surfacewave transducers. Electron. Lett. , 92 - 93
    12. 12)
      • L.P. Solie . Piezoelectric waves on layered substrates. J. Appl. Phys. , 619 - 627
    13. 13)
      • G.S. Kino . Acoustoelectric interactions in acoustic-surface-wave devices. Proc. IEEE , 724 - 748
http://iet.metastore.ingenta.com/content/journals/10.1049/el_19770461
Loading

Related content

content/journals/10.1049/el_19770461
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address