Calculations of δv/v for thin-film s.a.w. transducers on a nonzero conductive silicon substrate
Theoretical results are presented for the piezoelectric coupling of a surface-acoustic-wave thin-film transducer on a silicon substrate having a nonzero electrical conductivity. It is shown that, for specific combinations of the material layer thicknesses, this conductivity disappears. Also, under certain conditions, the enhancement in the piezoelectric coupling is degraded.