Unidirectional surface-acoustic-wave transducers with a ZnO film on glass substrate

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Unidirectional surface-acoustic-wave transducers with a ZnO film on glass substrate

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© The Institution of Electrical Engineers
Published

A unidirectional surface-acoustic-wave transducer with a sputtered ZnO film on a glass substrate is presented, consisting of interdigital electrodes and a plate electrode on both sides of the film. Experiments are in good agreement with the equivalent-network approach, which is similar to Smith's networks for the normal interdigital transducer.

Inspec keywords: zinc compounds; acoustic surface wave devices; ultrasonic transducers

Other keywords: unidirectional surface acoustic wave transducer; interdigital electrodes; SAW; ZnO film; glass substrate; plate electrode

Subjects: Transduction; devices for the generation and reproduction of sound; Acoustic wave devices

References

    1. 1)
      • W.R. Smith , H.M. Gerard , W. Jones . Analysis and design of dispersive interdigital surface-wave transducers. IEEE Trans. , 458 - 469
    2. 2)
      • R.V. Schmidt , F.W. Voltmer . Piezoelectric elastic surface waves in anisotropic layered media. IEEE Trans. , 920 - 926
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