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Acoustic-bulk-wave resonators and filters operating in the fundamental mode at frequencies greater than 100 MHz

Acoustic-bulk-wave resonators and filters operating in the fundamental mode at frequencies greater than 100 MHz

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A localised ion-beam milling has been used to increase the fundamental frequency of acoustic-bulk-wave resonators. Monolithic filters in lithium niobate (Y+37°) and lithium tantalate (X) operating, respectively, at 220 and 230 MHz have been realised. The relative bandwidth is equal to 1% and the insertion loss is about 4 dB. An a.t.-cut quartz resonator working in the fundamental mode at 270 MHz with a Q-factor of 12 000 has also been obtained. In this case, the vibrating membrane is 6 μm thick, with a centre portion of diameter 2.5 mm.

References

    1. 1)
      • Castellano, R.N., Hokanson, J.L.: `A survey of ion beam milling techniques for piezoelectric device fabrication', Proceedings of annual frequency control symposium, 1975, p. 128–134.
    2. 2)
      • Guttwein, G.K., Ballato, A.D., Lukaszek, T.J.: 3 694 677, 26 September 1972, United States Patent.
    3. 3)
      • G.C. Coussot . Bulk wave resonator for the 100–300 MHz frequency range. Proc. IEEE , 590 - 591
    4. 4)
      • Sawamoto, K.: `Energy trapping in a lithium tantalate ', Proceedings of annual frequency control symposium, 1971, p. 246–250.
    5. 5)
      • Volluet, G., Savy, M.: `Étude d'application électronique du tantalate de lithium', 36803195, DRME Report, .
    6. 6)
      • W. Shockley , D.R. Curran , D.J. Koneval . Trapped energy modes in quartz filter crystals. J. Acoust. Soc. Am. , 981 - 993
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