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ZnO film concave transducer for focusing radiation of microwave ultrasound

ZnO film concave transducer for focusing radiation of microwave ultrasound

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A ZnO piezoelectric film has been satisfactorily deposited on a concave substrate of a gold hemispherical shell to produce a concave transducer for microwave ultrasound. The fabrication process of the concave transducer, with a focal distance of 5–9 mm, and also experiments on focusing radiation in water at 100 MHz. are described.

References

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      • N. Chubachi , M. Minakata , Y. Kikuchi . Physical structure of dc diode sputtering ZnO films and its influence on the effective electromechanical coupling factors. Japan J. Appl. Phys. , 737 - 740
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      • Chubachi, N., Sannomiya, T.: `A quarter-wavelength piezoelectric film transducer to radiate microwave ultrasounds into a liquid', To be presented at the joint meeting of Related Societies of Electrical Engineering in Tohoku Chapter, October 1976, Japan.
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      • M. Minakata , N. Chubachi , Y. Kikuchi . Variation of c-axis orientation of ZnO thin films deposited by dc diode sputtering. Japan J. Appl. Phys. , 474 - 475
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