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Frequency/stress sensitivity of s.a.w. resonators

Frequency/stress sensitivity of s.a.w. resonators

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© The Institution of Electrical Engineers
Published

Surface-acoustic-wave resonators can be used as stress sensors for measuring force and pressure. Experiments at 160 MHz using rotated y-cut substrates indicate that larger linear changes in resonator frequency can be obtained by deforming the substrate. The s.a.w. transducers, besides being small in size, are also stable in frequency.

Inspec keywords: pressure transducers; stress measurement; crystal resonators; ultrasonic transducers; acoustic surface wave devices

Other keywords: stress sensors; frequency/stress sensitivity; SAW resonators; resonator frequency

Subjects: Sensing devices and transducers; Mechanical instruments, equipment, and techniques; Acoustic wave devices; Transduction; devices for the generation and reproduction of sound; Mechanical variables measurement; Transducers

References

    1. 1)
      • Dias, J.F., Karrer, H.E.: `Stress effects in acoustic surface wave circuits and applications to pressure and force transducers', IEEE catalogue 74CH0823-5ISSCC, IEEE International Solid State Circuits Conference Digest of Technical Papers, 1974, 17, p. 166–167.
    2. 2)
      • Lewis, M.: `The surface acoustic wave oscillator—a natural and timely development of the quartz crystal oscillator', Proceedings of 28th annual symposium on frequency control, 1974, US Army Electronics Command, , p. 304–309.
    3. 3)
      • Nalamwar, A.L., Epstein, M.: `Propagation of surface acoustic waves in strained media', Proceedings of ultrasonics symposium, 1975, p. 484–487.
    4. 4)
      • Staples, E.J.: `UHF surface acoustic-wave resonators', Proceedings of 28th annual symposium on frequency control, 1974, p. 280–285.
    5. 5)
      • Reeder, T.M., Cullen, D.E., Gilden, M.: `Saw oscillator pressure sensors', Proceedings of ultrasonic symposium, 1975, p. 264–268.
    6. 6)
      • Lakin, K.M., Joseph, T.R.: `Surface wave resonators', IEEE catalogue 75 CHb994-4SU, Proceedings of ultrasonics symposium, 1975, p. 269–278.
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