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Frequency/stress sensitivity of s.a.w. resonators

Frequency/stress sensitivity of s.a.w. resonators

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Surface-acoustic-wave resonators can be used as stress sensors for measuring force and pressure. Experiments at 160 MHz using rotated y-cut substrates indicate that larger linear changes in resonator frequency can be obtained by deforming the substrate. The s.a.w. transducers, besides being small in size, are also stable in frequency.

References

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      • Lewis, M.: `The surface acoustic wave oscillator—a natural and timely development of the quartz crystal oscillator', Proceedings of 28th annual symposium on frequency control, 1974, US Army Electronics Command, , p. 304–309.
    2. 2)
      • Staples, E.J.: `UHF surface acoustic-wave resonators', Proceedings of 28th annual symposium on frequency control, 1974, p. 280–285.
    3. 3)
      • Lakin, K.M., Joseph, T.R.: `Surface wave resonators', IEEE catalogue 75 CHb994-4SU, Proceedings of ultrasonics symposium, 1975, p. 269–278.
    4. 4)
      • Dias, J.F., Karrer, H.E.: `Stress effects in acoustic surface wave circuits and applications to pressure and force transducers', IEEE catalogue 74CH0823-5ISSCC, IEEE International Solid State Circuits Conference Digest of Technical Papers, 1974, 17, p. 166–167.
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      • Nalamwar, A.L., Epstein, M.: `Propagation of surface acoustic waves in strained media', Proceedings of ultrasonics symposium, 1975, p. 484–487.
    6. 6)
      • Reeder, T.M., Cullen, D.E., Gilden, M.: `Saw oscillator pressure sensors', Proceedings of ultrasonic symposium, 1975, p. 264–268.
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