For access to this article, please select a purchase option:
IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.
Your recommendation has been sent to your librarian.
Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage wave-forms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10−11 A for a 12.5 kV beam and a settling time of 30 ms.
Inspec keywords: electron microscopes; voltage measurement
Other keywords:
Subjects: Electron and ion microscopes and techniques; Electron and ion microscopes; Voltage measurement