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Sampling-mode scanning electron microscope for probing fast voltage waveforms

Sampling-mode scanning electron microscope for probing fast voltage waveforms

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© The Institution of Electrical Engineers
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Sampling-oscilloscope-type circuitry has been interfaced with an s.e.m., which allows the resolution of fast voltage wave-forms on devices up to gigahertz repetition frequencies. The sampling is performed by 100 ps-wide beam pulses, at a maximum sampling rate of 1 MHz. Voltage contrast linearisation has a resolution of 100 mV at an average current of 10−11 A for a 12.5 kV beam and a settling time of 30 ms.

Inspec keywords: electron microscopes; voltage measurement

Other keywords: fast voltage waveforms; voltage contrast linearisation; gigahertz repetition frequencies; scanning electron microscope; sampling mode SEM

Subjects: Electron and ion microscopes and techniques; Electron and ion microscopes; Voltage measurement

References

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      • : `A voltage measurement scheme for the SEM using a hemispherical retarding analyser', Proceedings of 1976 SEM symposium, 1976, IIT Research Institute, , p. 595–601.
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      • I. Yamada , T. Takagi . A new type of travelling wave deflection system. IEEE Trans. , 204 - 212
    3. 3)
      • W.J. Tee , A. Gopinath . Improved voltage measurement system for the SEM. Rev. Sci. Instrum
    4. 4)
      • G.S. Plows , W.C. Nixon . (1968) J. Phys. E..
    5. 5)
      • Gopinath, A., Hill, M.S.: `Some aspects of the stroboscopic mode: a review', Proceedings of 1974 SEM symposium, 1974, IIT Research Institute, , p. 235–242.
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