C.W. oscillation with p+-p-n+ silicon IMPATT diodes in 200 GHz and 300 GHz bands

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C.W. oscillation with p+-p-n+ silicon IMPATT diodes in 200 GHz and 300 GHz bands

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Submillimetre-wave silicon single-drift-region IMPATT diodes with a p+pn+ structure have been fabricated by ion implantation. C.W. output powers of 7.5 mW at 285 GHz and 78 mW at 185 GHz were obtained. The maximum c.w. oscillation frequency observed was 394 GHz.

Inspec keywords: solid-state microwave devices; IMPATT diodes; semiconductor device manufacture; ion implantation

Other keywords: ion implantation; CW oscillation; p+-p-n+ Si IMPATT diodes; 200 GHz; 300 GHz; submillimetre wave Si single drift region IMPATT diodes; CW output powers

Subjects: Semiconductor doping; Junction and barrier diodes; Semiconductor industry

References

    1. 1)
      • Ohmori, M., Ishibashi, T., Makimura, T., Ono, S.: `Design of Si IMPATT diodes for high-frequency operation', Paper at Technical Group on Electronic Devices, 1976, IECE, , ED-75-72.
    2. 2)
      • L.S. Bowman , C.A. Burrus . Pulse-driven silicon p-n junction avalanche oscillators for the 0.9 to 20 mm band. IEEE Trans. , 411 - 418
    3. 3)
      • Yamazaki, H., Ino, M., Makimura, T.: `Boron ion implantation into Si (DDR IMPATT diodes)', Proceedings of 5th Symposium on Ion Implantation into Semiconducters, 1974, p. 73–76, Japan.
    4. 4)
      • S.M. Sze , J.C. Irvin . Resistivity, mobility, and impurity levels in GaAs, Ge, and Si at 300 K. Solid-Slate Electron. , 599 - 602
    5. 5)
      • B. Culshaw . Effect of carrier diffusion on operation of avalanche diodes. Electron. Lett. , 143 - 144
    6. 6)
      • T. Ishibashi , M. Ohmori . , 200 GHz, 50 mW CW oscillation with Si SDR IMPATT diodes.
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