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Nondestructive optical technique for electrically testing insulated-gate integrated circuits

Nondestructive optical technique for electrically testing insulated-gate integrated circuits

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A simple nondestructive optical technique for electrically testing insulated-gate integrated circuits and for testing dielectric layers for pinholes and breakdown strength is described using a nematic liquid crystal in the dynamic scattering mode. Good correlation has been obtained between this technique and conventional electrical-probe test results. The technique has also proved particularly useful for fault locating and diagnosis.

References

    1. 1)
      • G.H. Heilmeier , L.A. Zanoni , L.A. Barton . Dynamic scattering: A new electrooptic effect in certain classes of nematic liquid crystals. Proc. Inst. Elect. Electron. Engrs. , 1162 - 1171
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