Piezoelectric performance improvement of ScAlN film and two-port SAW resonator application

Kaifei Dong; Fang Wang; Meng Deng; Shuo Yan; Kailiang Zhang

Piezoelectric performance improvement of ScAlN film and two-port SAW resonator application

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Author(s): Kaifei Dong¹ ; Fang Wang¹ ; Meng Deng¹ ; Shuo Yan¹ ; Kailiang Zhang¹
- Affiliations: 1: School of Electrical & Electronic Information Engineering , Tianjin Key Laboratory of Film Electronic & Communication Devices, Tianjin University of Technology , Tianjin 300384 , People's Republic of China
Source: Volume 55, Issue 25, 12 December 2019, p. 1355 – 1357
DOI: 10.1049/el.2019.2714 , Print ISSN 0013-5194, Online ISSN 1350-911X

Received 09/08/2019, Published 18/10/2019

Highly c-axis-oriented scandium-doped aluminium nitride films (ScAlN) were prepared on platinum substrates by DC magnetron sputtering. The effect of sputtering power on the crystal quality and piezoelectric properties of ScAlN thin film was investigated. The test results show that the piezoelectric properties of the ScAlN film first strengthen and then weaken with the increase of sputtering power, and the optimal piezoelectric properties are obtained under the condition of 180 W. Furthermore, a surface acoustic wave (SAW) resonator with an interdigital transducer width of 500 nm was fabricated by electron beam lithography. The SAW device exhibits a resonant frequency of 1.887 GHz and a quality factor (Q) of 170.8.

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Piezoelectric performance improvement of ScAlN film and two-port SAW resonator application

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