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Micro-printing of patterned diamond-like carbon coatings on glass by anodic bonding

Micro-printing of patterned diamond-like carbon coatings on glass by anodic bonding

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A novel micro-printing process, using anodic bonding to deposit patterned diamond-like carbon (DLC) coatings on glass, is investigated. Various patterns such as squares, triangles and letters are successfully fabricated. The coatings are characterised by Raman spectroscopy, atomic force microscope (AFM) and ultraviolet spectrophotometer. A G-band shift of approximately 1614 cm−1 indicates that the DLC coatings have a relatively high content of sp3 bonds (>20%). The result of the AFM topography shows that the surface roughness of DLC coatings is 1.21 nm. The transmittance of DLC-coated glass wafer is above 85% ranging from 760 to 1100 nm, indicating that the patterned DLC coatings have high optical transparency in the infrared radiation spectral range.

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      • 7. Lapadatu, A.C., Jakobsen, H.: ‘Anodic bonding’ (Elsevier Inc, Burlington, MA, USA, 2010, 2nd edn.).
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