@ARTICLE{ iet:/content/journals/10.1049/el.2018.1410, keywords = {Ge-Si;direct-current magnetron sputtering;sputter coating;temperature 300 degC;post-CMOS integration;low thermal budget;polycrystalline germanium films;}, ISSN = {0013-5194}, language = {English}, title = {laying it on thick}, journal = {Electronics Letters}, issue = {17}, volume = {54}, year = {2018}, month = {August}, pages = {1015-1015(0)}, publisher ={Institution of Engineering and Technology}, copyright = {© The Institution of Engineering and Technology}, url = {https://digital-library.theiet.org/;jsessionid=1ka7ie5u0b2q3.x-iet-live-01content/journals/10.1049/el.2018.1410} }