2.55 GHz miniaturised phased antenna array based on 7 nm-thick Hf x Zr1 − x O2 ferroelectricsA miniaturised phased array, suitable for a low-power wireless device and able to be fed from its battery, is experimentally demonstrated. The phase array consists in two gold patch antennas, phase shifters and additional circuitry, all integrated on Hf x Zr1−x O2/high-resistivity silicon 4 inch wafer. The radiation beam at 2.55 GHz is steered with 25° when the 7 nm-thick ferroelectric is biased with ±1 V.
