© The Institution of Engineering and Technology
A microring resonator realised by femtosecond laser two-photon photopolymerisation in an epoxy-based negative photoresist (SU-8) is proposed and demonstrated, which is further proved to be capable of temperature and refractive index sensing by monitoring the shift of the resonance wavelength of the interferometric pattern. The experimental results indicate refractive index sensitivity of 12.50 nm/refractive index unit (redshift) and temperature sensitivity of −9.51 × 10−2 nm/oC (blueshift), respectively.
References
-
-
1)
-
6. Lipka, T., Moldenhauer, L., Wahn, L., et al: ‘Optofluidic biomolecule sensors based on a-Si:H microrings embedded in silicon-glass microchannels’, Opt. Lett., 2017, 42, (6), pp. 1084–1087 (doi: 10.1364/OL.42.001084).
-
2)
-
7. Lu, P., Chen, Q.: ‘Femtosecond laser microstructured fibre refractive index sensor with temperature compensation’, Electron. Lett., 2010, 46, (24), pp. 1616–1617 (doi: 10.1049/el.2010.2773).
-
3)
-
5. Wang, J., Cheng, Z., Shu, C., et al: ‘Optical absorption in graphene-on-silicon nitride microring resonators’, Photon. Technol. Lett., 2015, 27, (16), pp. 1765–1767 (doi: 10.1109/LPT.2015.2443051).
-
4)
-
4. Yanagase, Y., Yamagata, S., Kokubun, Y.: ‘Wavelength tunable polymer microring resonator filter with 9.4 nm tuning range’, Electron. Lett., 2003, 39, (12), pp. 922–924 (doi: 10.1049/el:20030595).
-
5)
-
1. Zhou, L., Sun, X., Xie, J., et al: ‘Characterisation of microring resonator optical delay and its dependence on coupling gap using modulation phase-shift technique’, Electron. Lett., 2012, 48, (25), pp. 1613–1614 (doi: 10.1049/el.2012.2743).
-
6)
-
2. Van, V.: ‘Optical microring resonators: theory, techniques, and applications’ (CRC Press, Boca Raton, Florida, USA, 2016).
-
7)
-
3. Paloczi, G.T., Huang, Y., Yariv, A.: ‘Free-standing all-polymer microring resonator optical filter’, Electron. Lett., 2003, 39, (23), pp. 1650–1651 (doi: 10.1049/el:20031090).
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2017.4585
Related content
content/journals/10.1049/el.2017.4585
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Correspondence
This article has following corresponding article(s):
in brief
Femtosecond laser fabricated polymer microring resonator for sensing applications