access icon free High-performance fully transparent Al–Sn–Zn–O thin-film transistors using double-channel structures

We successfully fabricated the fully transparent Al–Sn–Zn–O thin-film transistors (ATZO TFTs) on glass by RF magnetron sputtering, and then the electrical performances of the ATZO TFTs are optimized with double-channel structures. The double-channel structures are formed by using bilayer ATZO films fabricated successively with different oxygen partial pressure in the sputtering process. The operation mechanism for double-channel structures were clarified. Owing to the double-channel structure, the ATZO TFT demonstrates excellent electrical performances, including a high ON/OFF current ratio (I on /I off) of 1.1 × 108, a steep threshold swing SS of 266.3 mV/decade, a superior saturation mobility μ sat of 134.1 cm2/Vs, and a threshold voltage V T of 1.2 V.

Inspec keywords: sputter deposition; zinc compounds; thin film transistors; tin compounds; aluminium compounds; semiconductor thin films; semiconductor materials

Other keywords: threshold voltage; double- channel structures; bilayer ATZO films; glass; High-performance fully transparent thin-film transistors; radio frequency magnetron sputtering; Al-Sn-Zn-OAl2O3-SnO2-ZnO; steep threshold swing; ON/OFF current ratio; electrical performances; saturation mobility; voltage 1.2 V; oxygen partial pressure

Subjects: Other field effect devices; Sputter deposition

http://iet.metastore.ingenta.com/content/journals/10.1049/el.2016.0896
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content/journals/10.1049/el.2016.0896
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