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0.25 μm emitter InP/InGaAs double heterojunction bipolar transistors (DHBTs) are presented that simultaneously exhibit a high collector current density (J c) of more than 3 mA/μm2 and high breakdown voltage (BVCEO) of 12 V. The DHBTs consist of a 30 nm-thick InGaAs base, 250 nm-thick InGaAs/InAlGaAs/InP collector and 150 nm-thick n-doped InP field buffer. Since the doping level of the InP field buffer is relatively high, only the InGaAs/InAlGaAs/InP collector is depleted at low V CE. Thus, the DHBTs can provide f t = 173 GHz and f max = 470 GHz at J c = 3.5 mA/μm2. On the other hand, at a high V CE, both the InGaAs/InAlGaAs/InP collector and InP field buffer are depleted. Therefore, the effective depletion thickness increases, which results in a BVCEO of 12 V. These results indicate that the use of the InP field buffer provides both high-speed performance and high BVCEO.
References
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1)
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3. Kashio, N., Kurishima, K., Ida, M., Matsuzaki, H.: ‘Over 450 GHz ft and fmax InP/InGaAs DHBTs with a passivation ledge fabricated by utilizing SiN/SiO2 sidewall spacers’, IEEE Trans. Electron Devices, 2014, 61, (10), pp. 3423–3428 (doi: 10.1109/TED.2014.2349872).
-
2)
-
2. Bouvier, Y., Nagatani, M., Nakamura, M., Murata, K., Tezuka, K., Uchino, H., Uneme, S., Gotou, T.: ‘A 9 V gain-controlled dual-channel limiting driver in InP DHBT technology for 100 Gbps DP-QPSK optical communications’. Proc. Topical Workshop on Heterostructure Microelectronics, Hakodate, Japan, September 2013, pp. 9–10.
-
3)
-
1. Kashio, N., Kurishima, K., Sano, K., Ida, M., Watanabe, N., Fukuyama, H.: ‘Monolithic integration of InP HBTs and uni-traveling-carrier photodiodes using nonselective regrowth’, IEEE Trans. Electron Devices, 2007, 54, (7), pp. 1651–1657 (doi: 10.1109/TED.2007.898669).
-
4)
-
4. Kurishima, K., Ida, M., Kashio, N., Fukai, K.Y.: ‘Performance of InP/InGaAs HBTs with a thin highly n-type doped layer in the emitter–base heterojunction vicinity’, IEICE Trans. Electron., 2012, E95-C, (8), pp. 1310–1316 (doi: 10.1587/transele.E95.C.1310).
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