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There is no abstract available for this article.

Inspec keywords: scanning probe microscopy; microactuators; nanopositioning; ceramic capacitors

Other keywords: nanopositioning; microactuator; hybrid circuit component; nanotechnology; hysteresis-free characteristics; multilayer ceramic capacitor; scanning probe microscopes

Subjects: Microactuators; Spatial variables control; Microactuators; Capacitors; MEMS and NEMS device technology

References

    1. 1)
      • journal-id:.
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2014.0898
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X7R dielectric multilayer ceramic capacitors show good micro-actuating properties with little hysteresis