SPR properties of 2D ZnO nano-holes fabricated by laser interference lithography

SPR properties of 2D ZnO nano-holes fabricated by laser interference lithography

For access to this article, please select a purchase option:

Buy article PDF
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Your details
Why are you recommending this title?
Select reason:
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

ZnO nanostructures are proposed to enhance the performance of surface plasmon resonance (SPR). The ZnO nanostructures on a 50 nm-thick Au thin-film are composed of nano-holes with a period of 300 nm. The ZnO nano-holes coupled SPR was simulated using the three-dimensionanl finite-difference time-domain method. The ZnO nano-holes have been fabricated by a laser interference lithography and wet etching process. The measured resonance angle of 47.5° was obtained; this agreed well with the simulated result. In comparison with the author's previous report, the figure of merit of ZnO nano-holes coupled SPR was two times higher than that of the ZnO grating structure.


    1. 1)
      • 1. Abdulhalim, I., Zourob, M., Lakhtakia, A.: ‘Surface plasmon resonance for biosensing: a mini-review’, Anal. Chem., 2010, 82, pp. 12071212 (doi: 10.1021/ac901797j).
    2. 2)
      • 2. Lee, M.R., Fauchet, P.M.: ‘Two-dimensional silicon photonic crystal based biosensing platform for protein detection’, Opt. Express, 2007, 15, pp. 45304535 (doi: 10.1364/OE.15.004530).
    3. 3)
      • 3. Lin, K., Lu, Y., Chen, J., Zheng, R., Wang, P., Ming, H.: ‘Surface plasmon resonance hydrogen sensor based on metallic grating with high sensitivity’, Opt. Express, 2008, 16, pp. 1859918604 (doi: 10.1364/OE.16.018599).
    4. 4)
      • 4. Byun, K.M., Kim, S.J., Kim, D.: ‘Grating-coupled transmission-type surface plasmon resonance sensors based on dielectric and metallic gratings’, Appl. Opt., 2007, 46, pp. 57035708 (doi: 10.1364/AO.46.005703).
    5. 5)
      • 5. Kim, D.G., Kim, S.H., Oh, G.Y., Ki, H.C., Kim, H.J., Choi, Y.W.: ‘Surface plasmon resonance of ZnO nano-structures with enhanced evanescent field’, Electron. Lett., 2011, 47,(3), pp. 202203 (doi: 10.1049/el.2010.7159).
    6. 6)
      • 6. Liu, H., Wang, B., Leong, E.S.P., Yang, P., Zong, Y., Si, G., Teng, J., Maier, S.A.: ‘Enhanced surface plasmon resonance on a smooth silver film with a seed growth layer’, ACS Nano, 2010, 4, pp. 31393146 (doi: 10.1021/nn100466p).

Related content

This article has following corresponding article(s):
blind spot sensing
This is a required field
Please enter a valid email address