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SPR properties of 2D ZnO nano-holes fabricated by laser interference lithography

SPR properties of 2D ZnO nano-holes fabricated by laser interference lithography

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ZnO nanostructures are proposed to enhance the performance of surface plasmon resonance (SPR). The ZnO nanostructures on a 50 nm-thick Au thin-film are composed of nano-holes with a period of 300 nm. The ZnO nano-holes coupled SPR was simulated using the three-dimensionanl finite-difference time-domain method. The ZnO nano-holes have been fabricated by a laser interference lithography and wet etching process. The measured resonance angle of 47.5° was obtained; this agreed well with the simulated result. In comparison with the author's previous report, the figure of merit of ZnO nano-holes coupled SPR was two times higher than that of the ZnO grating structure.

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