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access icon free SU-8 micromachined WR-3 band waveguide bandpass filter with low insertion loss

  • Author(s): Q. Chen 1 ; X. Shang 2 ; Y. Tian 2 ; J. Xu 1 ; M.J. Lancaster 2
    • View affiliations
    • Affiliations: 1: School of Physical Electronics, University of Electronic Science and Technology of China, Cheng du, 610054, People's Republic of China;
      2: School of Electronic, Electrical and Computer Engineering, The University of Birmingham, Birmingham, B15 2TT, United Kingdom
  • Source: Volume 49, Issue 7, 28 March 2013, p. 480 – 482
    DOI:  10.1049/el.2013.0277 , Print ISSN 0013-5194, Online ISSN 1350-911X
© The Institution of Engineering and Technology
Received 22/01/2013, Published

Presented is a WR-3 band (220–325 GHz) waveguide bandpass filter, which is constructed from three offset waveguide resonators operating at TE101 mode. This directly coupled resonator filter with Chebyshev response is designed to have a centre frequency of 300 GHz, a fractional bandwidth of 3.3% and a passband return loss of 20 dB. This filter is fabricated using thick SU-8 photoresist micromachining technique and has been tested. The measured average passband insertion loss is as low as around 0.4 dB. The measured return loss is better than 15 dB across the whole passband.

Inspec keywords: micromachining; Chebyshev filters; millimetre wave filters; band-pass filters; waveguide filters

Other keywords: SU-8 micromachined WR-3 band waveguide bandpass filter; off-set waveguide resonator; Chebyshev response; TE<sub>101</sub> mode; coupled resonator filter; frequency 220 GHz to 325 GHz; low insertion loss; noise figure 20 dB; frequency 300 GHz; passband return loss; SU-8 photoresist micromachining technique

Subjects: Filters and other networks; Waveguide and microwave transmission line components

References

    1. 1)
      • 1. Lancaster, M.J., Zhou, J., Ke, M.L., Wang, Y., et al: ‘Design and high performance of a micromachined K-band rectangular coaxial cable’, IEEE Trans. Microw. Theory Tech., 2007, 55, (7), pp. 1548–1553 (doi: 10.1109/TMTT.2007.900339).
    2. 2)
      • 2. Shang, X., Ke, M.L., Wang, Y., Lancaster, M.J., et al: ‘Micromachined WR-3 waveguide filter with embedded bends’, Electron. Lett., 2011, 47, (9), pp. 545–547 (doi: 10.1049/el.2011.0525).
    3. 3)
      • 3. Hong, J., Lancaster, M.J.: ‘Microstrip filters for RF/microwave applications’ (John Wiley & Sons, Inc., 2001).
    4. 4)
      • 4. CST Microwave Studio, CST GmbH, Darmstadt, Germany, 2011.
    5. 5)
      • J.S.G. Hong , M.J. Lancaster . (2001) Microstrip filters for RF/microwave applications.
    6. 6)
      • CST Microwave Studio, CST GmbH, Darmstadt, Germany, 2011.
    7. 7)
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