© The Institution of Engineering and Technology
A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 µW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.
References
-
-
1)
-
B.S. Lee ,
S.C. Lin ,
W.J. Wu ,
X.Y. Wang ,
P.Z. Chang ,
C.K. Lee
.
Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film.
J. Micromech. Microeng.
,
1 -
8
-
2)
-
C. Sun ,
L. Qin ,
F. Li ,
Q.M. Wang
.
Piezoelectric energy harvesting using single crystal Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) device.
J. Intell. Mater. Syst. Struct.
,
559 -
568
-
3)
-
H.B. Fang ,
J.Q. Liu ,
Z.Y. Xu ,
L. Dong ,
L. Wang ,
D. Chen ,
B.C. Cai ,
Y. Liu
.
Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting.
Microelectron. J.
,
1280 -
1284
-
4)
-
M.P. Lu ,
J.H. Song ,
M.Y. Lu ,
M.T. Chen ,
Y.F. Gao ,
L.J. Chen ,
Z.L. Wang
.
Piezoelectric nanogenerator using p-type ZnO nanowire arrays.
Nano Lett.
,
3 ,
1223 -
1227
-
5)
-
I.A. Ivan ,
M. Rakotondrabe ,
J. Agnus ,
R. Bourquin ,
N. Chaillet ,
P. Lutz ,
J.C. Poncot ,
R. Duffait ,
O. Bauer
.
Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT materials for composite bimorph actuators.
Rev. Adv. Mater. Sci.
,
1 -
9
-
6)
-
M. Marzencki ,
Y. Ammar ,
S. Basrour
.
Integrated power harvesting system including a MEMS generator and a power management circuit.
Sens. Actuators A
,
363 -
370
-
7)
-
A. Mathers ,
K.S. Moon ,
J.G. Yi
.
A vibration-based PMN-PT energy harvester.
IEEE Sens. J.
,
731 -
739
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2012.1419
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content/journals/10.1049/el.2012.1419
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