Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever

Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever

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A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 µW with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.


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      • I.A. Ivan , M. Rakotondrabe , J. Agnus , R. Bourquin , N. Chaillet , P. Lutz , J.C. Poncot , R. Duffait , O. Bauer . Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT materials for composite bimorph actuators. Rev. Adv. Mater. Sci. , 1 - 9

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