References

• 1. 1)
     • Y.-T. Chen , H.L. Kao . Humidity sensors made on polyvinyl-alcohol film coated SAW devices. Electron. Lett. , 16 , 948 - 949
  2. 2)
     • Z. Chen , C. Lu . Humidity sensors: a review of materials and mechanisms. Sens. Lett. , 4 , 274 - 295
  3. 3)
     • Tetelin, A., Achen, A., Pouget, V., Pellet, C., Topper, M., Lachaud, J.-L.: `Water solubility and diffusivity in BCB resins used in microelectronic packaging and sensor applications', Proc. of 2005 IEEE Instrumentation and Measurement Technology Conf. (IMTC 2005), 2, p. 792–796, Ottawa, Canada.
  4. 4)
     • B. Drafts . Acoustic wave technology sensors. IEEE Trans. Microw. Theory Tech. , 4 , 795 - 802
  5. 5)
     • Dow Chemical Company: ‘Processing Procedures For CYCLOTENE 4000 Series Resin (DS3000 Immersion Develop Process)’, Feb. 2005, pp. 1–9.
  6. 6)
     • A. Tetelin , C. Pellet . Modeling and optimization of a fast response capacitive humidity sensor. IEEE Sens. J. , 3 , 714 - 720
  7. 7)
     • Saldanha, N., Puccio, D., Malocha, D.C.: `Experimental measurements and modeling of aluminum reflection gratings on YZ LiNbO3 for OFC SAW sensors', 2006 IEEE Int. Frequency Control Symp. and Exposition, Miami, FL, USA, p. 368–373.
  8. 8)
     • Wang, C.H., Liu, Y., Desmulliez, M., Richardson, A.: `Integrated sensors for health monitoring in advanced electronic systems', Proc. 4th Int. Design and Test Workshop 2009, (IDT 2009), Riyadh, Saudi Arabia, p. 1–6.