BCB film based SAW humidity sensor
Novel benzocyclobutene (BCB) film based surface acoustic wave (SAW) humidity sensors were successfully designed and fabricated. A sensitivity of 0.26 dB/RH% was successfully demonstrated between 8.6 and 90.6% relative humidity (RH), with a linear relationship between RH level and resonance amplitude. The temperature stability of resonance frequency and amplitude has also been studied.