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Driven by a travelling wave, a piezoelectric micropump with a sawtooth microchannel is presented. An easy fabrication method is proposed, and the characteristics of the micropump are tested at different frequencies. Compared to the micropump with a straight microchannel, the micropump with a sawtooth microchannel has higher flow rate and back pressure (33.36 μl/min and 1.13 kPa) at low voltage because of the low resistance of the microchannel. Meanwhile, the relationship of the flow rate to the back pressure of the micropump is in inverse proportion.
References
-
-
1)
-
U.S. Schwarz ,
N.Q. Balaban ,
D. Riveline ,
A. Bershadsky ,
B. Geiger ,
S.A. Safran
.
Calculation of forces at focal adhesions from elastic substrate data: the effect of localized force and the need for regularization.
Biophys. J.
,
3 ,
1380 -
1394
-
2)
-
T. Suzuki ,
Y. Teramura ,
H. Hata ,
K. Inokuma ,
I. Kanno ,
H. Iwata ,
H. Kotera
.
Development of a micro biochip integrated traveling wave micropumps and surface Plasmon resonance imaging sensors.
Microsyst. Technol.
,
1391 -
1396
-
3)
-
D.J. Laser ,
J.G. Santiago
.
A review of micropumps.
J. Micromech. Microeng.
,
35 -
64
-
4)
-
A. Olsson ,
G. Stemme ,
E. Stemme
.
Diffuser-element design investigation for valve-less pumps.
Sens. Actuators A
,
137 -
143
-
5)
-
J. Ogawa ,
I. Kanno ,
H. Kotera ,
K. Wasa ,
T. Suzuki
.
Development of liquid pumping devices using vibrating microchannel walls.
Sens. Actuators A
,
211 -
218
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2011.2035
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