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Piezoresistive pressure sensor using vertically aligned carbon-nanotube forests

Piezoresistive pressure sensor using vertically aligned carbon-nanotube forests

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A pressure sensor functionalised with vertically aligned carbon nanotubes is presented. The sensor is fabricated to have a multi-walled carbon-nanotube forest supported by a deflectable 8 µm-thick Parylene-C membrane that is suspended by the silicon frame. The responses of the fabricated sensors are experimentally characterised. The sensitivities to positive and negative gauge pressures are found to be comparable in magnitude with the average values of −986 and +816 ppm/kPa, respectively. The measurement also reveals that the temperature coefficient of resistance for the forest suspended with the Parylene membrane is −515 ppm/°C and ∼3× smaller than that for the forest fixed onto the silicon substrate.

Inspec keywords: pressure gauges; silicon; pressure sensors; carbon nanotubes; polymerisation; elemental semiconductors; piezoresistive devices

Other keywords: pressure sensor; Parylene-C membrane; fabrication; silicon substrate; gauge pressures; piezoresistive sensor; multiwalled; carbon nanotube

Subjects: Sensing and detecting devices; Semiconductor devices; Sensing devices and transducers

References

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      • Zhang, M.Q.H., Fung, C.K.M., Chow, G.C.T., Li, W.J., Leong, P.: `Parylene-C embedded CNT-based MEMS piezoresistive pressure sensors using DEP nanoassembly', 6thIEEE Conf. on Nanotechnology, 2006, (IEEE-NANO 2006), 2006, Cincinnati, OH, USA, 2, p. 802–805.
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      • Keulemans, G., Ceyssens, F., Volder, M.D., Seo, J.W., Puers, R.: `Fabrication and characterization of carbon nanotube composites for train sensor applications', MME2010, 2010, Enschede, The Netherlands.
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      • Lin, C.-M., Lin, L.-Y., Fang, W.: `Monolithic integration of carbon nanotubes based physical sensors', IEEE 23rd Int. Conf. on Micro Electro Mechanical Systems (MEMS), 2010, Wanchai, Hong Kong, p. 55–58.
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      • R. Saito , G. Dresselhaus , M.S. Dresselhaus . (1998) Physical properties of carbon nanotubes.
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