http://iet.metastore.ingenta.com
1887

Negative backside thermoreflectance modulation of microscale metal interconnects

Negative backside thermoreflectance modulation of microscale metal interconnects

For access to this article, please select a purchase option:

Buy article PDF
$19.95
(plus tax if applicable)
Buy Knowledge Pack
10 articles for $120.00
(plus taxes if applicable)

IET members benefit from discounts to all IET publications and free access to E&T Magazine. If you are an IET member, log in to your account and the discounts will automatically be applied.

Learn more about IET membership 

Recommend Title Publication to library

You must fill out fields marked with: *

Librarian details
Name:*
Email:*
Your details
Name:*
Email:*
Department:*
Why are you recommending this title?
Select reason:
 
 
 
 
 
Electronics Letters — Recommend this title to your library

Thank you

Your recommendation has been sent to your librarian.

The variation of backside reflectance modulation effects on metal line samples at different electrical bias and silicon backside thicknesses is investigated. Negative reflected intensity modulations are observed and are one to two orders of magnitude larger than the values from published results. It was found that the negative reflected intensity modulation with electrical bias depends on the temperature variation of the absorption coefficient while observed positive reflectance intensity modulation is due to temperature variation of the reflectance.

References

    1. 1)
    2. 2)
    3. 3)
    4. 4)
    5. 5)
    6. 6)
    7. 7)
      • Teo, J.K.J., Chua, C.M., Koh, L.S., Phang, J.C.H.: `Backside reflectance modulation of microscale metal interconnects', Proc. Int. Reliability Physics Symp., (IRPS), April 2011, Monterey, CA, USA, to be published.
    8. 8)
    9. 9)
http://iet.metastore.ingenta.com/content/journals/10.1049/el.2011.0302
Loading

Related content

content/journals/10.1049/el.2011.0302
pub_keyword,iet_inspecKeyword,pub_concept
6
6
Loading
This is a required field
Please enter a valid email address