Adaptive levitation control using single neuron for micromachined electrostatically suspended gyroscope

Adaptive levitation control using single neuron for micromachined electrostatically suspended gyroscope

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An efficiently adaptive single neuron proportional integral (SNPI) controller for a non-silicon micromachined electrostatically suspended gyroscope is proposed and experimentally validated. The microgyroscope utilises a spinning and five degree-of-freedom suspended rotor as the proof mass, and thus is characterised by potential navigation-grade precision. The SNPI controller, which features simplicity, efficiency and robustness, is explored to realise reliable initial levitation and stable suspension of the rotor in the presence of dynamic nonlinearities, microfabrication imperfections and disturbances. Experimental results demonstrate that a desirable initial levitation process can be achieved with 10% overshoot at most and 15 ms setting time using the SNPI controller, which also works well in response to a 10 Hz, 3 Vp-p mimic square axial acceleration input.


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      • F. Cui , W.Y. Chen , W.P. Zhang , Q.J. Xiao , G.Y. Ma , W. Liu . Design and fabrication of an electrostatically suspended microgyroscope using UV-LIGA technology'. Microsyst. Technol. , 12 , 1885 - 1896
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